J-MEMS RightNow
Stay up to date with the latest developments in the MEMS areas with IEEE RightNow Access for J-MEMS. Enjoy temporary Open Access to selected featured papers from the latest J-MEMS edition.
Volume 33 Issue 3 (May 2024)
Vacuum-Sealed MEMS Resonators Based on Silicon Migration Sealing and Hydrogen Diffusion
Tianjiao Gong, Muhammad Jehanzeb Khan, Yukio Suzuki, Takashiro Tsukamoto, Shuji Tanaka
Volume 33 Issue 2 (April 2024)
Surface Micromachined CMOS-MEMS Pirani Vacuum Gauge With Stacked Temperature Sensor
Xu, Wei; Song, Xiangyu; Huang, Lifeng; Lin, Yuanjing; Hong, Linze
Volume 33 Issue 1 (February 2024)
Frequency Selection in a MEMS Flexural Beam Resonator by Electrostatic Actuation
Kazemi, Mohammad; Nabavi, Seyedfakhreddin; Gratuze, Mathieu; Nabki, Frederic
JMEMS Right Now Archive
